File:IWGN-2003-12-60.pdf

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Description: Generalized net model of the discrete part manufacturing process of CMOS integrated circuit wafers
Author(s): Marin Marinov, Maria Stefanova-Pavlova, Krassimir Atanassov
Source: Proceedings of International Workshop on Generalized Nets/2003
Date: 2003
License: All rights reserved (by default)
Other versions: —

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current	13:37, 18 March 2009	0 × 0 (318 KB)	Vassia Atanassova (talk \| contribs)	{{upload \| description = Generalized net model of the discrete part manufacturing process of CMOS integrated circuit wafers \| author = [[Marin M

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